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Chemistry · Glossary

What is Chemical vapour deposition?

Definition 23.5 University Chemistry — Year 3 · Chapter 23 — Inorganic Materials and Nanomaterials

Chemical vapour deposition (CVD) grows a solid film on a heated surface by the reaction of gaseous precursors there, as silicon from silane, $\ce{SiH4 -> Si + 2H2}$ , or diamond from methane and hydrogen.

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